parts list:
00-680547-00, 00-680915-00, 00-681028-00,
0010-00171, 0010-00183, 0010-00706, 0010-01286, 0010-01602, 0010-03171,
0010-03244, 0010-09416, 0010-09495, 0010-09750, 0010-13629, 0010-17469,
HEATER, WxZ, 0010-20768, MAGNET, G12 SOURCE, 0010-21676, MAGNET, IMP VECTRA,
0010-35282, 0010-36940, 0010-37266, 0010-38437, SUSCEPTOR, P-CHUCK, 0010-60011,
0015-20035, ASSY, CAM FOLLOWER, 0020-00247, 0020-00521, 0020-03398, 0020-03413,
0020-03423, 0020-03589, 0020-03597, 0020-03656,, 0020-03674, 0020-04074,
0020-04099, 0020-04160, 0020-09029, 0020-09030, 0020-09031, 0020-09039,
0020-09069, 0020-09316, 0020-09366, 0020-09375, 0020-09933, 0020-10414,
0020-10519, 0020-107300020-10771, 0020-20113, 0020-20114, 0020-20119,0020-20522,
0020-21114, 0020-21366, 0020-22499, 0020-22844, 0020-22906, 0020-22908,
0020-22909, 0020-23587, 0020-23811, 0020-24236, 0020-24435, 0020-24840,
0020-26312, 0020-27123, 0020-27668, 0020-28906, BASIC SHIELD KIT, 0020-28907,
0020-30086, 0020-30314, 0020-30347, 0020-30406, 0020-30447, 0020-30678,
0020-30797, 0020-31490, 0020-31493, 0020-31656, 0020-31698, 0020-48171,
0020-70436, 0020-38055, 0020-70436, 0020-78548, 0020-78957, 0021-35713,
0021-35867, 0021-70220, 0040-00285, 0040-01878, 0040-02818 THROTTLE VALVE BODY, TXZ SHOWERHEAD,
0040-20321, 0040-31943, OXIDE LID, PVD/CVD, 200MM, 0040-99197,0045-00003,
0090-09299, ESC 200MM, ELECTROSTATIC CHUCK, LAM ELECTROSTAIC CHUCK, APPLIED
MATERIALS ELECTROSTATIC CHUCK, 0090-35133, 010-03156, 0100-00011, 0150-70018,
0100-20001, 0150-09635, USA-606AXRNAL, X-121-X, WV-BM500, UFC-1200, UFC-1300,
UFC-1360, UFC-1661,UFC-1660, UFC-8100, TMP361C, T97000-03/SP1993-3767S,
STPH-1000C, STP-1000C,SS-8-VCR-2-GR, SS-4BK-1C, SS-4-WVCR-6-400, SP1995-7144, SP1993-3683/834T0002-01,
serv.502.28221, SERV.502.27481, serv.502.27146, SERV.454.54832, SERV.454.52702,
SERV.454.16261, SERV.454.11121, SERV.438-42615, SERV.436.29852, SERV.436.07281,
SCUH2000,SEIKO SEIKI TRUBO CONTROLLERS, SCU1000, SCUA1303, SCU1000, RN814-6800-1,
RO-28, RF-10S, RETICLE CASE, DETECTOR, PARTICLE ASML, PD4, PB ½,OEM-6B,
OEM-25B, PB-10, LF-210ALF-30, LF-10, KBA00600-AE01, PCB, WGA I/F, UNIT, LASER
DIODE, KBB00251A4KBB00605-U01, PCB, RT-5SC1KBB01015-AE01, KBB02110-AE05, PCB,
XYDRV, MIRROR, I-LINE, KBB05011-G08, BREAKER, THERMAL MAGNETIC, IV-2410, STEC
INJECTION VALVES, GMW-25A, FC-D980C, EXT 255H, D7800DCD, CLX-600, CA-FH,
854-011153-001, 854-011153-002, 857-510354-001, KIT, GASKET ALLIANCE,
853-012200-002, 853-011141-003, BRAKE, RF GAP, 853-009520-001, 853-004073-001,
849-510402-001 KIT, ALLIANCE QUICK CLEAN, 843-010364-001, KIT, LAM RAINBOW GAP
REBUILD, 839-440462-336, ESC, LAM 6" LAM 9400, 840-009865-100,
840-009865-040, 810-017031-004, 810-004115-002, 810-004115-001, 810-000392-001,
PCB, SERIAL I/O, 796-008792-012, 810-001317-001,795-002627-001, 766-009866-100,
754-090359-015, 750-007782-001,734-092041-001, 718-443144-006, 716-460785-007,
716-443090-002, 716-140125-100, BAFFLE, LOWER OF 3 SiC7,16-06711-001,
716-012101-001, PLUNGER, 1/4 TURN, 716-011573-001, 716-011543-001,
716-011009-001, 716-008854-001, 715-443130-001, RING, OUTER ESC
8",715-443098-001, 715-011985-106, 715-011925-,001, 715-011629-006CAP,
LOWER ELECTRODE,715-011565-001, 715-011531-015, 715-007469-002, 713-028487-001,
713-011560-001, SHROUD RING ALLIANCE, TEFLON LAM SHROUD RING, 713-011545-002,
676-000504-003, MOTOR, 12VDC, 660-099301-002, 653B-2-50-2, 5964 BROOKS MFC,
5850E BROOKS MFC, 5517A LASER INTERFEROMETER, 4N019-948, NIKON LOAD ARM,
3870-01767, 3870-01766, 4CX1500B, 4S007-014. 4S014-051-2, WL2 CONTROLLER, PCB,
4S602-010, 4S999-094, 4S999-200, 4S017-904, I-12 LOAD ARM, 3700-01205, APPLIED
MATERIALS O-RINGS, CHEMRAZ, 3690-01544, 3690-01628, 2110-320626-1, LINER, SIC,
27-032182-00, 2G571-014, 3030-01966, 3155081-001, 16-033932-00, 16-033931-00,
05-111902-00, 19-00056-00, 19-00266-01, 19-00267-01, 19-00268-01. 1N270,
15-11606-00, 152H-PO, 15-107698-00 CAP CERAMIC, 15-053394-02,
15-053394-01,15-053394-01,15-034333-00, 15-032939-00, 15-032016-00, 1501025-00, 15-00951-00, 15-00742-00,
15-00699-01, 15-00684-00, 15-00680-00, 15-00578-00, 15-00558-02, 15-00558-01,
15-00484-00, 15-00483-00, 15-00475-00, 15-000731-00, 0224-01809,0200-35264,
0200-20376, 0200-20375, 0200-20060,0200-10446, 0200-10445, 0200-10392,
0200-10246, 0200-09970 0200-09911, 0200-09898, 0200-09787, 0200-09785,
0200-09782, 0200-09744, 0200-09716, 0200-09665, 0200-09657, 0200-09645,
0200-09603, 0200-09555, 0200-09478, 0200-09478, 0200-09450, 0200-09444,
0200-09432, 0200-09384,0200-09319, 0200-09216, 0200-09319, 0200-09158, WINDOW
QUARTZ, 0200-09147, 0200-09035, 0200-09025, 0200-09021, 0200-09002, 0200-02873,
0200-02555, 0200-02540, 0200-00436, 0200-00417, 0200-00020, 0200-00034,
0200-00039, 0200-00062, 0200-00071, 0190-075080, 0190-35602, 0190-09134,
0190-03156, 0190-01546, 0190-00405, 0150-70018, 0150-09635, Serv.486.25161, PV-1502MC, 0010-10619, 853-440462-002
Gate Valve Housing Assy5ROT032690, 5ROT032690, 0040-21357 , 715-012219-001,
715-012250-001, 2-39-56158, 1A11P001 LAMP HEATER 1500W, CFD-8T BELLOWS PUMP
IWAKI , 750-001127-001, 739-007783-001 QUAD SEAL, 319371 MAGNETRON , 3700-01275
, 713-280781-001, 716-140069-001, 10-029927-00 , Millipore CWUZ0S0S1,
1110-408562-12, 4S020-004 PCB, 4S020-028 WGA I/F, 0010-76805 and 0010-76808,
9216-SC513, 9210-SC513, 978-SC513, 849-099344-005, 716-011057-002,
716-018614-082,5TOT052477, 5BKOB0721, 4QDK220537, 5TOT050935, 4QOD793107,
5TOT0022173MOT000841, 5UOT078314, 3REF018092, 5UOT035561, 2KDB001150,
3REF018068, 3ROT003923, 2KDB001119, D3CL82146, 3ROT034530, 4RDK503048,
D4CN26775, 2KOT004706, 2KDB001168, 2KPE002034, 3REF018076, 5UOT058167,
2HOT000161, 2KOT006701, 3MOT000056, 4BOT161320, D3CL82140, 5TBD001081,
5TBC012154, 5UOT098767, 2KOT007766, 3MOT001070, 5POT000926, 3RCA021087,
FD235HFAZ40, 2HOT000203, 5UOT036114, 3ROT046039, IR-1000-S, 5UOT112048,
3ROT045502, 3ROT032690, 3DOT005766, 4QDK220487, 4BOT161312,
3MOT000153, 3HCC0051707-39-07965, 5-39-01114, 5-39-51540, 7-39-07965,
5-F4-05825, 7-39-05978, MLPS-2C-A-5, YY4622160, DHT-00-27-000, DHT-00-50-000,
UPM-2-144-M, YY46HB24B, 127AA-00010B, 127AA-00001B, 0021-09718, 0021-09104,
0200-00917, 0020-33333, 0020-30287, 0200-10191, 0020-30533, 0150-76190.0680-01218,
0040-02818, 0050-37556, 0020-30681, 0200-10162, 0200-10194, 3700-01486,
4020-01016, 3690-02004, 3880-01085, 0020-30533, 0050-37556, 0020-30681,
0200-10074, 0200-10111, 0020-23585, 0020-22499, 0200-10158, 0200-10157,
0200-10144, 0200-10143, 0200-10164, 0200-10169, 0200-00289, 0200-10284,
0200-10074, 0200-00464, 0200-18093, 0200-01009, 0200-09747, 0200-00307,
0200-39133, 0200-01276, 0200-09974, 0200-18090, 0200-01359, 0200-00247,
0200-35828, 0200-10087, 0200-09740, 0200-09904, 0242-76378, 1110-3, 08938-11,
1380-002668-11, 1380-100625-11, 1380-101264-11, 1380-101338-11, 1380-101461-11,
1386-453040-12, 1910-349255-11, 2910-290041-12,2980-090661-13,2980-190085-11,
2980-190134-11, 2980-190215-11, 2980-191582-11,2986-400692-14, CT024-013907-11,
CT1380-002055-11,CT2902-40001-12,CT2910-403681-11, CT2980-19555-11,SERV.436.06514,
KNIEL POWER SUPPLIES,4022.502.28861, E17037010,E17063190, E11066750, E17089262,
E17089252, E16048581, E11066770,E42000082, E17168280, Varian Implanter Parts, EH500,
790-008939-002,515-011835-001, 720-000950-010,796-093055-001,839-190104-001,
715-030320-001,734-061280-278, 715-330180-001, 716-330915-001, 715-031055-001,
766-092079-102, 714-495015-001, 955-091372-001, 100763608, 721-000956-001,
100763610, 796-090059-001, 955-097742-001, 515-540061-008, 720-00930-004,
230-140148-308, 716-140125-100, 715-443131-001, 715-443098-001, 796-002672-001,
720-000920-016, 921-008973-001, 716-018614-082, 716-011057-002, 715-443130-001,
713-028487-001, 560-450328-00, 730-450573-00, 713-250851-00, 796-009365-001,
754-092082-002, 715-330135-001, 765-091116-001, 715-012209-001, 716-330045-002,
716-330892-007, 716-330121-001, 716-230121-001, 716-230121-211, 716-330504-081,
716-140139-001, 716-330504-064, 716-330504-081, 716-140068-001, 720-000950-012,
715-443202-001, 716-011536-001, 795-002627-001, 795-006734-001,716-460916-001,
716-460685-007, 840-009865-040, 853-001983-010, 853-001983-005,
716-028028-004,716-443090-002, 853-442064-002, 790-007854-001, 768-090914-001,
797-094970-001, 715-028754-004, Tokyo Electron Limited ESC, Electrostatice
Chuck, ASML Power Supplied, Nikon, STEc injection Valve, LF-210, Applied
Materials Quartz, DSS200, Lam/Ontrack Scrubber, Dainippon Screen, DNS 80,
Kokusai Furnace, Applied Materials Endura, MKS/ENI Generator,
keywords:
Seiko Seiki Pump,
Ebara Turbo Pumps, Leybold Turbo Pumps, Nikon Printed Circuit Boards, PCB, Lam
Ceramic Rings, Edge Rings, Quartz Pipes, Ceramic Shields, Applied Materials
Cassette Handlers, Insert Rings, Applied Material SiC, Lift Pins, Hoops,
Applied Materials Heaters, STPH1000C, STP1000C, SCUH2000,CTI Cryogenics,
Kokusai Loadlocks, AMAT Applied Material Robot Blades, 200MM Spare Parts, G12
Endura Clear Lids, Magnets Durasource, ENI Generators, IMP Vectra Magnets,
Ultima Chucks, Perkin Elmer, Nikon Stepper Parts, ASML Stepper Parts, ASML TCU
Lamps, Cymer Laser Parts, Lam Lower Electrodes, Lam Graphite, Lam Alliance,
Applied Materials Centura, Applied Materials DPS parts, Applied Materials CVD,
Applied Materials PVD, Applied Materials Implant, Applied Materials Focus
Rings, Lam Research Focus Rings, DNS Solenoid Valve TEL Track parts, Pincette,
Motor Drivers, Yaskawa Motos, Burning Controllers, Kokusai Temperature
Controllers, Kokusai Dust Support Covers, Fan, SMC Air Cylinders, Flow
Controllers, Aera Mass Flow Controllers, MKS Baratrons, MKS Transducers,
631a01TBE , TMP 361C, Circuit Breakers, Pillar Fittings, TMP1000C, TMP1000, Nikon
Lasers, Nikon Laser Power Supply, Nikon Body 10 Stepper Parts, WGA, Varian
Implanter Ground, Proteus Flow Switches, Ceramic Plugs, DC Bias, Lift Hoops ,
O-Rings, Chemraz O-Rings, Kalrez, O-Rings, Omron Switches, Omron Photoelectric,
Pressure Transducer, STEC Piezo Valve, Injection Valve, DPS Poly, DPS Ceramic
Domes, R2 Oxide Lids, Applied Materials Cassette handlers 200MM, 8 Spare
Parts, Genus CVD WSI Ceramic, Lam Research Rainbow Parts, Parts for 4540, Parts
for 4528, Autoetch 490, Lam 590, Lam 790, Lam 9600 TCP, Lam Poly, EPI Reactors,
SVG track, Tokyo Electron ACT 8 Parts, Panasonic Motors, Vexta Drivers,
Stepping Motors, Pulse Motors, Micromotors, New Surplus Semiconductor
Manufacturing parts, New 2nd Source Semiconductor parts,
Electrostatic Chuck, Ceramic Fuse, Ceramic Resistors, USHIO Lamps, KDNS Parts,
Ultratech parts, Semix SOG parts, Edwards Pumps, Leybold Pumps, Kokusai DJ-803,
Kokusai CVD, Applied Materials Alignment Kit, Test Wafers, Prime Wafers, 6
Nikon Reticle Cases, 5 Nikon Reticle Cases, Brooks Mass Flow Controllers, WxZ,
TxZ, Wide Body parts, Gasline, Tosoh Targets, Flourescent Lamps, Osram Bulbs,
Cooling Fans, Applied Materials Source, Applied Materials Timing Belt, Nikon
Timing Belt, Nikon Couplings, Nikon Side Slide Arms, Nikon Ceramic Arms, Nikon
Fingers, Lid Plates, AMAT Centura, Applied Materials RTP,Lam Excelan, Inner Gate Bellows, inner Gate
cylinder, Lam PCB, Lam Printed Circuit Board, PVD Sputtering, RF Match, Endura,
8330 Quartz, TFT Display Parts, FDP Parts Applied Materials, Quartz, Quartz
Rings, Quartz Pipe, Lam 9100 Match, Semitool, Semitool Arms, End Effectors, FSI,